VAISALA

Vaisala offers trusted and reliable measurements for semiconductor manufacturers and MEMS foundries, semiconductor equipment vendors, fab operators, and material suppliers. Wafer fabrication is a critical stage in semiconductor manufacturing that uses wet chemistry processes such as chemical mechanical planarization (CMP), potassium hydroxide (KOH) silicon etching, and EKC^® post-etch residue removal. These resource and energy-intensive operations often require costly analyzers to ensure liquid concentrations meet quality requirements. The Vaisala K-PATENTS^®Semicon Refractometer is uniquely engineered for chemical process monitoring and fault detection during semiconductor wafer fabrication.