Increasing semiconductor process challenges rely on water, chemicals, solvents, and gases which are free of yield killing submicron or nanometer size particles, as well as metal, ionic, and organic contaminants which can be leached from wetted materials. Filtration of these fluids is a critical requirement in semiconductor and other microelectronics processes. Filters and purification devices must remove the particles from upstream particle sources while not contributing other unwanted contaminants. We offer an extensive line of filtration products through our partner, Cobetter Filtration.
Choose your application…
CMP Filtration (Chemical Mechanical Planarization)
Without CMP (chemical mechanical planarization), advanced multi interconnect level semiconductor devices would not be possible. CMP slurries work chemically and mechanically on special tools (polishers) to smooth wafer surfaces. Well designed filters remove unwanted large hard particles and agglomerates in CMP slurries that can land on and scratch the wafer surface, while allowing engineered working particles in the slurry to pass through the filter.
| Product Series | Membrane | Main Construction Material | Available Configuration | ||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PP | PES | PTFE | PE | Nylon66 | Other | PFA | PP | HDPE | PVDF | 316LSS | Capsule | Cartridge | Mini Cartridge | Housing | |||||||||||||
| Pleavalid → | • | • | • | • | |||||||||||||||||||||||
| Keevalid → | • | • | • | • | |||||||||||||||||||||||
| Keevalid II→ | • | • | • | • | |||||||||||||||||||||||
| Dualvalid → | • | • | • | • | |||||||||||||||||||||||
View Key Features & Benefits by Series | CMP
Pleavalid CMP Filters Series | ||||||
|---|---|---|---|---|---|---|
 | Pleavalid pleated CMP filters are well suited for higher solids slurries and those which may be more prone to agglomerations. The wide pleats provide more surface area which increases service life and fewer filter change outs. Cartridges and capsules come in a wide range of pore sizes, from 0.1um to 5.0um. Pleavalid cartridge filters can be used in in the global loop to protect on-tool filters. As capsules, the pleated design is an effective final filter, especially in higher solids oxide slurries. | |||||
| Pleated micro and nanofiber media | Provides high flow rates and dirt holding capacity
Effective in higher solids and reducing formation of agglomerations | |||||
| Polypropylene media | Compatible with most slurries | |||||
| Flushed with Ultra-Pure Water | Ensures high cleanliness and low particle shedding | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Keevalid CMP Filters Series | ||||||
|---|---|---|---|---|---|---|
| Keevalid CMP filters are ideal where the highly efficient removal of defect causing contaminants is critical. The continuously graded pore structure removes defect causing particles while not changing the slurry manufacture's intended particle size distribution. Rolled nanofiber provides similar classification, but with higher flow characteristics. Cartridges and capsules come in a wide range of pore sizes, from 70nm to 40um, making them suitable for extending the life of downstream on-tool filters or as the final defect reducing solution just before slurry is dispensed. | |||||
| Graded-density PP Depth Media | Highly efficient in removing defect-causing particles without changing the intended working particle size distribution | |||||
| Optional Rolled PP Nanofiber Media | Provides the highest flux rate and efficient contaminant removal | |||||
| Flushed with Ultra-Pure Water | Ensures high cleanliness and low particle shedding | |||||
| Cartridge Length to 20" | Cartridge lengths are available for higher flow source and global loop applications | |||||
| Variety of Capsule Sizes | Fits most on-tool flow and spaces | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Keevalid II CMP Filters Series | ||||||
|---|---|---|---|---|---|---|
| Keevalid II CMP filters are the next generation based on Cobetteer's legacy Keevalid series. Like the original Keevalid series, these filters are available with depth or rolled micro and nanofiber media in a variety of sizes and configurations to meet a wide-range of process requirements. Filters are flushed with ultra-pure water to ensure cleanliness and low particle shedding. Like the original Keevalid series, these filters are available in the options depth or rolled micro and nanofiber media. | |||||
| Graded-density PP Depth Media | Highly efficient in removing defect-causing particles without changing the intended working particle size distribution | |||||
| Optional Rolled PP Nanofiber Media | Provides the highest flux rate and efficient contaminant removal | |||||
| Flushed with Ultra-Pure Water | Ensures high cleanliness and low particle shedding | |||||
| Cartridge Length to 20" | Cartridge lengths are available for higher flow source and global loop applications | |||||
| Variety of Capsule Sizes | Fits most on-tool flow and spaces | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Dualvalid CMP Filters Series | ||||||
|---|---|---|---|---|---|---|
| Dualvalid CMP filters are uniquely designed for integrated circuit manufacturers and chemical mechanical planarization slurry manufacturers. Cobetter's patented construction combines two slurry filtration technologies, wide pleats and rolled graded density polypropylene media in one filter. The outer wide pleats increase media surface area and promote longer filter life, while the rolled media construction around the core provides efficient retention of those particles which are likely to cause scratches on the surface of the wafer. Dualvalid is a good choice for slurries where lower pressure drops are desirable, without giving up efficient defect-causing particle removal. | |||||
| Outer layer wide pleats | Provides high flow rates and dirt holding capacity | |||||
| Inner multi-layer nanofiber rolled media | Provides high flux rate and efficient defect causing particle removal | |||||
| Polypropylene Media | Compatible with most slurries | |||||
| Flushed with Ultra-Pure Water | Ensures high cleanliness and low particle shedding | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Electronic Chemicals & Materials
Microelectronics, and especially semiconductor end users rely on highly specialized, very pure, chemicals, gases, and materials for device fabrication. Electronic chemicals must be delivered to device manufacturers with very few, very small particles. Filters are used to remove particles in a multi-step filtration process beginning with pre-filtration of raw materials and ending with final filter at the packaging step which allows these manufacturers to meet their customer’s strict particle specifications.
| Product Series | Membrane | Main Construction Material | Available Configuration | ||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PP | PES | PTFE | PE | Nylon66 | Other | PFA | PP | HDPE | PVDF | 316LSS | Capsule | Cartridge | Mini Cartridge | Housing | |||||||||||||
| Novacon → | • | • | • | • | |||||||||||||||||||||||
| Novacise → | • | • | • | • | |||||||||||||||||||||||
| Chemphobic→ | • | • | • | • | |||||||||||||||||||||||
| ChemRapid→ | • | • | • | • | |||||||||||||||||||||||
| ChemVast→ | • | • | • | • | |||||||||||||||||||||||
| Chemega → | • | • | • | • | |||||||||||||||||||||||
| EPPX → | • | • | • | ||||||||||||||||||||||||
| Prifend → | • | • | • | ||||||||||||||||||||||||
| Prifend HF → | • | • | • | ||||||||||||||||||||||||
| ArrayForce (Degasser) → | • | • | • | ||||||||||||||||||||||||
| Chemdeion | • | • | • | • | |||||||||||||||||||||||
| IonGard Aqua→ | • | • | • | • | • | ||||||||||||||||||||||
| IonGard DL → | • | • | • | • | • | • | |||||||||||||||||||||
| IonGard SL→ | • | • | • | • | |||||||||||||||||||||||
| Photopex Nylon → | • | • | • | • | • | ||||||||||||||||||||||
| Photopex UPE → | • | • | • | • | • | • | |||||||||||||||||||||
| Fluorolink Housing → | • | • | |||||||||||||||||||||||||
| HCP Housing → | • | • | • | ||||||||||||||||||||||||
View Key Features & Benefits by Series | Electronic Chemicals & Materials Filters
Novacon Filters Series | ||||||
|---|---|---|---|---|---|---|
 | Novacon® Series filters are specially designed for dilute acids, bases, and other process chemical mixtures as a cost-effective alternative for lower temperature wet etch and clean applications.The asymmetric PES (polyethersulfone) membrane provides significant retention of particles (down to 1nm) with additional beneficial characteristics including high flow rates, high particle holding capacity, and longer filter lifetime. In addition, the membrane structure and high surface energy is effective in reducing bubble formation during flow. The HDPE (High-Density Polyethylene) supports and cartridge structure ensure low metal extractables during filtration.Novacon disposable filters fluoropolymer shell and one-piece structural design provides high mechanical strength and makes installations easier. | |||||
| Highly asymmetric PES membrane | Combines excellent retention and high flow Ultra-clean performance out-of-box results in faster start up, reduces equipment pre-operation time Low surfactant binding | |||||
| High purity HDPE structure and PFA (for disposables) shell | Good chemical compatibility Low metal extractables | |||||
| High membrane surface area | High flow rate and longer life | |||||
| Industry standard connections | Ease of installation and replacement | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Provides convenience and decreases the chances of product contamination | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Chemphobic Filters Series | ||||||
|---|---|---|---|---|---|---|
| Chemphobic™ Filter Series are especially designed and ideally suited for high temperature and corrosive chemicals including hot H2SO4, H3PO4, and HNO3. The PTFE membrane ensures excellent chemical compatibility with consistent particle removal in a wide range of acids, bases and solvents. Ultra-clean all-fluropolymer construction construction minimizes metal extractables and other contaminants. High membrane surface area options provide high flow rates and extended service life to meet demanding process and tool availability requirements. Industry standard ultra-clean connections and the prewet option reduce equipment set up time. Its one-piece structural design and available T, L and In-line configurations make new installations and replacements easy. | |||||
| All fluoropolymer construction | Excellent chemical compatibility Ultra-low metal extractables | |||||
| High membrane surface area | High flow rate and longer life | |||||
| Industry standard connections | Ease of installation and replacement | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Provides convenience and decreases the chances of product contamination | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
ChemRapid Filters Series | ||||||
|---|---|---|---|---|---|---|
| Chemrapid™ Series filters are composed of a surface-modified PTFE membrane that is bonded with PFA, which results in ultra low metal extractables. It's higher surface energy solves the problem of membrane dewetting in process chemistries, especially those which are prone to outgassing. | |||||
All fluoropolymer construction | High chemical compatibility and ultra-low metal extractables | |||||
Surface modified PTFE | Resists dewetting and minimizes service disruption | |||||
100% integrity tested | Ensures complete particle capture from the start | |||||
High effective filtration area options | Provides high flow rates, low pressure drop, and long service life | |||||
Prewet option | Reduces equipment pre-operation time | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Chemvast Filters Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter Chemvast™ filter series are available in three different PTFE membranes including hydrophobic PTFE, hydrophilic PTFE or non-dewetting PTFE. With a HDPE support structure, the filter is highly compatible with most lower temperature, dilute semiconductor process chemistries Chemvast is available in a wide range of retention ratings and pore sizes to meet customer’s requirements. Non-dewetting PTFE resists dewetting by increasing the surface energy of the membrane which results in higher flow rates and filtration efficiency. With its HDPE cage, core, and high purity membrane, Chemvast is a lower cost alternative compared to the all-fluoropolymer Chemrapid® Filter Series. Chemvast Hydrophilic PTFE membrane can be used to filter dilute acidic and alkaline chemistries, as well as polar solvents without pre-wetting. | |||||
| HDPE Cage/Core | Good chemical compatibility Low metal extractable Lower cost compared to all-fluoropolymer filters | |||||
| Non-dewetting PTFE membrane option | Resists dewetting in lower temperature outgassing chemistries Enhanced retention of particles | |||||
| Hydrophilic PTFE membrane option | No prewetting Good performance in dilute HF solutions and some polar solvents | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
| 100% integrity tested | Ensures highly efficient particle retention every time | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Chemega Filters Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter Chemega™ filters are available with hydrophobic and hydrophilic highly efficient PTFE membranes to meet a wide range of high-purity chemical and solvent filtration applications. This filter is highly compatible with most lower temperature, dilute semiconductor process chemistries and solvents. Chemega is available in a wide range of retention ratings and pore sizes to meet customer’s requirements. With its polypropylene cage, core, and high purity PTFE membrane, Chemega has low metal extractables and is a good filtration solution where high-purity and high particle removal is required. Chemega Hydrophilic PTFE membrane can be used to filter dilute acidic and alkaline chemistries, as well as polar solvents without pre-wetting. | |||||
| Polypropylene Cage/Core | Good chemical compatibility Low metal extractable | |||||
| Hydrophilic PTFE membrane option | No prewetting Good performance in dilute HF solutions and some polar solvents | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
| 100% integrity tested | Ensures highly efficient particle retention every time | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
EPPX Filters Series | ||||||
|---|---|---|---|---|---|---|
| EPPXGF Filter Cartridges are constructed of electronic grade PP (polypropylene) nanofiber to provide efficient effective pre-filtration of process cooling water and pure chemicals and solvents. | |||||
| Highly porous nanofiber media | Provides high flow rates, longer service life, in cost-effective device | |||||
| High-purity PP heated and melted without using adhesives | Low extractables Fast recovery to resistivity baseline | |||||
| All-polypropylene construction | Excellent chemical compatibility with most acids, bases, and solvents. | |||||
| Removal ratings from 0.1 μm to 25 μm | Meets a wide range of requirements and specifications | |||||
| Quality Assurance | Manufactured in a facility which adheres to ISO 9001 practices. | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Prifend RO Filters Series | ||||||
|---|---|---|---|---|---|---|
| Prifend™ High Service Time FDP Series filters are made of continuously rolled microfiber which can provide 3x greater lifetime than normal meltblown filters used in Pre-RO water treatment. These filters are generally used where longer lifetime, high dirt holding capacity, and low change-out frequence are required. | |||||
| Continuously rolled PP graded microfiber media | High contaminant holding capacity Good particle retention efficiency | |||||
| Multiple end cap options | Suitable for use in a variety of industry-standard housings for easy installation in existing equipment | |||||
| Wide range of pore sizes | Provides drop-in solutions for a wide range of water pre-filtration applications | |||||
| Lengths to 40 inches | For high flow, high particle challenge applications | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Prifend HF Filters Series | ||||||
|---|---|---|---|---|---|---|
| Prifend™ FDPHF HIGH Flow Filter Cartridges are large, 6-inch diameter, single open-ended pleated cartridge filters with polypropylene core, cage, and end caps. The larger diameter filters with up to 90 ft2 (8.4 m2) filtration area offer maximum flow rates as high as 396 gpm (90m3/hr) from a single cartridge. Flow direction is from inside to outside which ensures that all contamination is held within the filter. With two media options, multi-layer polypropylene and PTFE, these filters provide much higher flow rates than typical cartridge filters, making installations and change outs quicker and easier. The polypropylene fiber media provides high efficiency filtration for pure water manufacturing. With the PTFE membrane, Prifend is also an excellent choice for bulk-chemical filtration. | |||||
| Multi-layer polypropylene pleated structure, 6-inch filters | Large filtration area with high contaminant holding capacity and high throughput | |||||
| Pleated PTFE media | Available in removal ratings from 20 nm to 10 μm, making it a good choice for some chemical filtration applications which require high flow | |||||
| Pure polypropylene core and cage | Provides cleanliness and strength Good chemical compatibility | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
IonGard Aqua Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter IonGard™ Aqua Purifier has been specifically designed for the removal of metal contaminants from ultrapure water. The IonGard™ Aqua Purifier can immediately and spontaneously remove metal ions from the water through ion exchange groups, making it especially suitable for the semiconductor industry's most terminal final cleaning processes. Available in a wide variety of sizes and configurations to meet all of your requirements. Please contact your Cobetter sales engineer for additional information. | |||||
Modified PE membrane | High metal removal efficiency Total metal removal for ultra pure water | |||||
Clean manufacturing | Manufactured in a cleanroom environment | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
IonGard DL Purifier Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter IonGard™ DL Purifiers have been specifically designed for semiconductor wafer cleaning applications. Utilizing the structure of polyethylene and polyethersulfone composite membranes, IonGard DL Purifiers assure excellent removal of trace metal ions as well as particles on the wafer surface. The Ultraclean product design minimizes system start up time and downtime. IonGard DL is available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| Polyethersulfone filter membrane with modified PE ion exchange media | Superior removal of cations in critical cleaning water applications High removal efficiency of particles from 7nm. Ultra-low Particles and Metal Ions extractables | |||||
| Ultraclean capsules | Ultraclean capsules with industry-standard fittings are ideal for research and single-wafer wafer rinse steps. Designed to fit space-limited on-tool installations. | |||||
| Manufactured in a cleanroom | IonGard DL is clean packaged and ready to install | |||||
| Cartridge length to 30" | Longer cartridges are available for higher flow chemical blending production. | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
IonGard SL Purifier Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter IonGard™ SL Purifier has been specifically designed for the removal of metal contaminants from photoresists and ultra high purity solvents. By modifying the ion exchange groups on the surface of membrane, the IonGard SL Purifier provides a fast and effective metal ions removal capability in various solvents and solvent resin mixtures. Available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| Modified PE purification membrane | Provides high metal removal efficiency Provides high ion-exchange capacity Provides total metal removal for ultraclean chemical manufacturers | |||||
| Ultraclean HDPE capsules | Ultraclean capsules with industry-standard fittings are perfect for research and small batch production. | |||||
| Manufactured in a cleanroom | IonGard SL is clean packaged and ready to install | |||||
| Cartridge length to 20" | Ideal for resist and solvent production lines | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photopex Nylon Filters Series | ||||||
|---|---|---|---|---|---|---|
| With high flow rate performance, excellent retention capabilities and cleanliness, Cobetter Photopex™ Nylon 6,6 Filter Cartridges are well suited for fi ltering photoresists, solvents and other chemicals in semiconductor processes. Photopex Nylon 6,6 Filter Cartridges use a pure unmodifi ed hydrophilic nylon membrane with guaranteed levels of metal extractable and particle cleanliness. The fi lter’s cleanliness reduces chemical waste and time to process after installation. Cobetter Photopex Nylon 6,6 fi lters are available in a wide variety of sizes and confi gurations to meet all your requirements. | |||||
| Cobetter nylon 6,6 membrane | Naturally hydrophilic media wets out easily with most fluids Adsorptive properties effective in removing certain contaminants High particle removal efficiency | |||||
| HDPE or PP supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
| Cartridge length to 20 inches | High flow and longer service life for photochemical manufacturing | |||||
| Wide range of capsule sizes and industry fittings | Easy installation and replacement of competitive capsules | |||||
| Higher initial cleanliness | Reduces pre-process time and chemical waste | |||||
| 100% integrity tested | Chance of abnormal particle passage is eliminated | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photopex UPE Filters Series | ||||||
|---|---|---|---|---|---|---|
| With retention ratings from 1nm to 0.1μm, Cobetter Photopex™ UPE (Ultra-High Molecular Weight Polyethylene) Filter Cartridges ensure excellent retention, cleanliness and high chemical compatibility to meet the critical demands in semiconductor processes. Cobetter's superior cleaning of the high purity HDPE (high-density polyethylene) structure ensures high cleanliness and low particle shedding. The unique UPE membrane morphology provides the highest retention of both hard particles and gels. High membrane surface area options make high flow rates and extended service life possible. Cobetter Photopex UPE filters are available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| UPE membrane | Highly efficient removal of hard and soft particles Wets out easily with most solvents and resists Resists dewetting in dilute acidic and alkaline chemistries | |||||
| HDPE supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
| High surface area options | High flow rate and longer life | |||||
| Wide range of capsule sizes and industry fittings | Easy installation and replacement of competitive capsules | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Fluorolink Series | ||||||
|---|---|---|---|---|---|---|
| Fluorolink™ is an all-fluoropolymer housing designed for ultra-high purity chemicals, chemical blends, and certain agressive chemicals applications. | |||||
Industry standard fittings | Industry standard flared fittings for easy installation | |||||
Compact design | Compact design is space saving and ideal for chemical distribution and on-tool applications | |||||
High temperature rating | Temperature rating to 100°C is ideal for the majority of chemical dispense, clean, and etch processes | |||||
Three locking ring choices | Three locking ring material choices can be matched to chemicals and solvents for robust operation and long life | |||||
Sturdy mounting bracket | Integrated mounting bracket enables secure installation | |||||
Large vents/drains | Larger 1/2” vents and drains promote faster venting and draining to reduce startup and filter changeout times | |||||
Chemical-compatible O-rings | TEV O-ring and Chemraz® options from Banner Industries offer complete range of chemical compatibility and a leak tight seal | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
HCP Housing Series | ||||||
|---|---|---|---|---|---|---|
| HCP Filter Housings are constructed of 100% natural polypropylene or PVDF without any coloring agents or chemicals. These housings provide broad chemical compatibility and are ideally suited for food & beverage, ultrapure water, and other high purity chemical applications. | |||||
100% natural polypropylene (PP) construction or PVDF | Provides cleanliness and broad chemical compatibility Low extractables - no chemicals and colorants are released during filtration process. | |||||
T-line configuration with top inlet and top outlet | inlet and top outletT-line configuration allows tubing to be kept inline | |||||
Drain on housing bottom | Easy to drain | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Photolithography
As semiconductor line widths shrink, photolithography technical boundaries are challenged and new photoresists and photochemicals with more stringent contaminant specifications are required. Special filters and purifiers for resists, UPW, certain organic solvents, remove hard and soft particles as well as certain ionic contaminants which can lead to increased defects during the resist coating process.
| Product Series | Membrane | Main Construction Material | Available Configuration | ||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PP | PES | PTFE | PE | Nylon66 | Other | PFA | PP | HDPE | PVDF | 316LSS | Capsule | Cartridge | Mini Cartridge | Housing | |||||||||||||
| IonGard SL → | • | • | • | • | |||||||||||||||||||||||
| IonGard DL → | • | • | • | • | • | • | |||||||||||||||||||||
| Photopex Nylon → | • | • | • | • | • | ||||||||||||||||||||||
| Photopex UPE → | • | • | • | • | • | • | |||||||||||||||||||||
| Photogile POU → | • | • | • | ||||||||||||||||||||||||
| Photogile POU Dummy Flush → | • | • | |||||||||||||||||||||||||
| Photogile PXOTT → | • | • | • | • | • | ||||||||||||||||||||||
| Photogile OTTII→ | • | • | • | • | |||||||||||||||||||||||
| Nylonpolar → | • | • | • | • | |||||||||||||||||||||||
View Key Features & Benefits by Series | Photolithography
IonGard SL Purifier Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter IonGard™ SL Purifier has been specifically designed for the removal of metal contaminants from photoresists and ultra high purity solvents. By modifying the ion exchange groups on the surface of membrane, the IonGard SL Purifier provides a fast and effective metal ions removal capability in various solvents and solvent resin mixtures. Available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| Modified PE purification membrane | Provides high metal removal efficiency Provides high ion-exchange capacity Provides total metal removal for ultraclean chemical manufacturers | |||||
| Ultraclean HDPE capsules | Ultraclean capsules with industry-standard fittings are perfect for research and small batch production. | |||||
| Manufactured in a cleanroom | IonGard SL is clean packaged and ready to install | |||||
| Cartridge length to 20" | Ideal for resist and solvent production lines | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
IonGard DL Purifier Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter IonGard™ DL Purifiers have been specifically designed for semiconductor wafer cleaning applications. Utilizing the structure of polyethylene and polyethersulfone composite membranes, IonGard DL Purifiers assure excellent removal of trace metal ions as well as particles on the wafer surface. The Ultraclean product design minimizes system start up time and downtime. IonGard DL is available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| Polyethersulfone filter membrane with modified PE ion exchange media | Superior removal of cations in critical cleaning water applications High removal efficiency of particles from 7nm. Ultra-low Particles and Metal Ions extractables | |||||
| Ultraclean capsules | Ultraclean capsules with industry-standard fittings are ideal for research and single-wafer wafer rinse steps. Designed to fit space-limited on-tool installations. | |||||
| Manufactured in a cleanroom | IonGard DL is clean packaged and ready to install | |||||
| Cartridge length to 30" | Longer cartridges are available for higher flow chemical blending production. | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photopex Nylon Filters Series | ||||||
|---|---|---|---|---|---|---|
| With high flow rate performance, excellent retention capabilities and cleanliness, Cobetter Photopex™ Nylon 6,6 Filter Cartridges are well suited for fi ltering photoresists, solvents and other chemicals in semiconductor processes. Photopex Nylon 6,6 Filter Cartridges use a pure unmodifi ed hydrophilic nylon membrane with guaranteed levels of metal extractable and particle cleanliness. The fi lter’s cleanliness reduces chemical waste and time to process after installation. Cobetter Photopex Nylon 6,6 fi lters are available in a wide variety of sizes and confi gurations to meet all your requirements. | |||||
| Cobetter nylon 6,6 membrane | Naturally hydrophilic media wets out easily with most fluids Adsorptive properties effective in removing certain contaminants High particle removal efficiency | |||||
| HDPE or PP supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
| Cartridge length to 20 inches | High flow and longer service life for photochemical manufacturing | |||||
| Wide range of capsule sizes and industry fittings | Easy installation and replacement of competitive capsules | |||||
| Higher initial cleanliness | Reduces pre-process time and chemical waste | |||||
| 100% integrity tested | Chance of abnormal particle passage is eliminated | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photopex UPE Filters Series | ||||||
|---|---|---|---|---|---|---|
| With retention ratings from 1nm to 0.1μm, Cobetter Photopex™ UPE (Ultra-High Molecular Weight Polyethylene) Filter Cartridges ensure excellent retention, cleanliness and high chemical compatibility to meet the critical demands in semiconductor processes. Cobetter's superior cleaning of the high purity HDPE (high-density polyethylene) structure ensures high cleanliness and low particle shedding. The unique UPE membrane morphology provides the highest retention of both hard particles and gels. High membrane surface area options make high flow rates and extended service life possible. Cobetter Photopex UPE filters are available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| UPE membrane | Highly efficient removal of hard and soft particles Wets out easily with most solvents and resists Resists dewetting in dilute acidic and alkaline chemistries | |||||
| HDPE supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
| High surface area options | High flow rate and longer life | |||||
| Wide range of capsule sizes and industry fittings | Easy installation and replacement of competitive capsules | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photogile POU Filter Series | ||||||
|---|---|---|---|---|---|---|
| Photogile Point-of-Use Filters are ideal for use in lithography photoresist dispense pumps and systems. The filters are available with UPE (Ultra-High Molecular Weight Polyethylene), Nylon 6,6, or Multi purification membranes to ensure rapid startup for selected photoresists, coatings, and solvents, including ArF, BARC, KrF, topcoat, and pre-thinners. Photogile POU filters ensure excellent retention, cleanliness, and high chemical compatibility to meet the critical demands in semiconductor processes. These low hold-up volume filters minimize chemical waste. Cobetter's superior cleaning of the high purity HDPE (high-density polyethylene) support/core/gage/endcaps/shell ensures high cleanliness. Cobetter Photogile filters are available in a wide variety of retention ratings to meet your process requirements. | |||||
Available in UPE, Nylon, and Multi-Membrane Configurations | UPE and nylon wets out easily with most solvents and resists UPE highly efficient removal of hard and soft particles | |||||
Low hold-up volume | Reduces expensive photochemical waste | |||||
Industry Standard Size/Fitting Connections | Ideal for use in a variety of photodispense systems and independent manifolds | |||||
Available with or without o-ring | Provides installation flexibility to compatible dispense systems and manifolds | |||||
HDPE supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
Prewet option | Reduces pre-operation time Easy start up with aqueous-based solutions | |||||
Specs, Flow Curves, and Part Number Configure | ||||||
Photogile PXOTT Filter Series | ||||||
|---|---|---|---|---|---|---|
| Photogile® PXOTT Point-of-Use Filters are ideal for use in critical lithography dispense applications. The one-piece constructions make filter replacement easy on compatible dispense systems and manifolds. With Photogile capsule filters, exposure to hazardous resists and solvents is eliminated. Photogile PXOTT comes with three media options; UPE, nylon, or PTFE, making it easy to match existing point-of-use process filtration requirements. | |||||
Available in UPE, Nylon, and PTFE Membrane Configurations | Provides flexbility to choose the best performing media in a variety of advanced lithography applications | |||||
Low hold-up volume | Reduces expensive photochemical waste | |||||
Industry Standard Size/Fitting Connections | Ideal for use in compatible photodispense systems and independent manifolds | |||||
| Capsule fitting design | Capsule fitting design limits worker exposure to hazardous solvents | |||||
Available with or without o-ring | Provides installation flexibility to compatible dispense systems and manifolds | |||||
HDPE supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
Prewet option | Reduces pre-operation time Easy start up with aqueous-based solutions | |||||
Specs, Flow Curves, and Part Number Configure | ||||||
Photogile OTTII Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter Photogile® OTTII point-of-use filters are ideally suited for use in DI water, developer, and solvents. Media choices of UPE (ultra-high molecular weight polyethylene) and Nylon provide ultra-clean and highly efficient particle removal for a range of photolithography critical applications. Capsule design mates easily with compatible manifolds for quick filter change outs meaning less downtime. Worker exposure to process fluids is minimized through this encapsulated design | |||||
| Available in UPE and Nylon Membrane Configurations | Provides flexbility to choose the best performing media in a variety of advanced lithography applications | |||||
| Low hold-up volume | Reduces expensive photochemical waste | |||||
| Industry Standard Size/Fitting Connections | Ideal for use in compatible photodispense systems and independent manifolds. | |||||
| Capsule fitting design | Capsule fitting design limits worker exposure to hazardous solvents | |||||
| Available with or without o-ring | Provides installation flexibility to compatible dispense systems and manifolds | |||||
| HDPE supports, PP shell | High chemical compatibility High cleanliness, including low metal extractables | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based solutions | |||||
Specs, Flow Curves, and Part Number Configure | ||||||
NylonPolar Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter Nylonpolar™ Solvent Purifier with surface-modified nylon membrane is well-suited for photoresist production and ultra high purity solvent applications. Available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| Modified nylon purification membrane | Provides ppt level metal contaminant removal performance | |||||
| Ultraclean HDPE capsules | Ultraclean capsules with industry-standard fittings are perfect for research and small batch production. | |||||
| Manufactured in a cleanroom | NylonPolar is clean packaged and ready to install | |||||
| Cartridge length to 20" | Ideal for resist and solvent production lines | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photogile POU Filter Series | ||||||
|---|---|---|---|---|---|---|
| Photogile® dummy filters are intended for short-term use in flushing photochemical dispense pumps and lines. This compact flow-through device ensures good system cleanliness between filter change-outs and before filter installations. Low holdup volume reduces chemical waste. There are three types of dummy filters available to meet different tool configuration needs; all suitable for most kinds of photochemicals, photoresists, and solvents. These flushing filters are manufactured in a cleanroom ensuring the devices have good cleanliness and quality control. | |||||
Specs, Flow Curves, and Part Number Configure | ||||||
Thin Film – ECD Copper Plating
Copper in back-end metalization processing is deposited via a highly controlled electrochemical deposition (plating) process. Filters play an important roll in removing particles from the electrolyte (copper sulfate) to make sure the deposited copper is mostly particle free. Higher surface energy filters, some hydrophilic, provide efficient particle removal.
| Product Series | Membrane | Main Construction Material | Available Configuration | ||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PP | PES | PTFE | PE | Nylon66 | Other | PFA | PP | HDPE | PVDF | 316LSS | Capsule | Cartridge | Mini Cartridge | Housing | |||||||||||||
| Novacon → | • | • | • | • | |||||||||||||||||||||||
| ChemVast→ | • | • | • | • | |||||||||||||||||||||||
| Photopex UPE → | • | • | • | • | • | • | |||||||||||||||||||||
| Fluorolink Housings → | • | • | |||||||||||||||||||||||||
View Key Features & Benefits by Series | Thin Film - ECD Copper Plating
Novacon Filters Series | ||||||
|---|---|---|---|---|---|---|
| Novacon® Series filters are specially designed for dilute acids, bases, and other process chemical mixtures as a cost-effective alternative for lower temperature wet etch and clean applications.The asymmetric PES (polyethersulfone) membrane provides significant retention of particles (down to 1nm) with additional beneficial characteristics including high flow rates, high particle holding capacity, and longer filter lifetime. In addition, the membrane structure and high surface energy is effective in reducing bubble formation during flow. The HDPE (High-Density Polyethylene) supports and cartridge structure ensure low metal extractables during filtration.Novacon disposable filters fluoropolymer shell and one-piece structural design provides high mechanical strength and makes installations easier. | |||||
| Highly asymmetric PES membrane | Combines excellent retention and high flow Ultra-clean performance out-of-box results in faster start up, reduces equipment pre-operation time Low surfactant binding | |||||
| High purity HDPE structure and PFA (for disposables) shell | Good chemical compatibility Low metal extractables | |||||
| High membrane surface area | High flow rate and longer life | |||||
| Industry standard connections | Ease of installation and replacement | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Provides convenience and decreases the chances of product contamination | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Chemvast Filters Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter Chemvast™ filter series are available in three different PTFE membranes including hydrophobic PTFE, hydrophilic PTFE or non-dewetting PTFE. With a HDPE support structure, the filter is highly compatible with most lower temperature, dilute semiconductor process chemistries Chemvast is available in a wide range of retention ratings and pore sizes to meet customer’s requirements. Non-dewetting PTFE resists dewetting by increasing the surface energy of the membrane which results in higher flow rates and filtration efficiency. With its HDPE cage, core, and high purity membrane, Chemvast is a lower cost alternative compared to the all-fluoropolymer Chemrapid® Filter Series. Chemvast Hydrophilic PTFE membrane can be used to filter dilute acidic and alkaline chemistries, as well as polar solvents without pre-wetting. | |||||
| HDPE Cage/Core | Good chemical compatibility Low metal extractable Lower cost compared to all-fluoropolymer filters | |||||
| Non-dewetting PTFE membrane option | Resists dewetting in lower temperature outgassing chemistries Enhanced retention of particles | |||||
| Hydrophilic PTFE membrane option | No prewetting Good performance in dilute HF solutions and some polar solvents | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
| 100% integrity tested | Ensures highly efficient particle retention every time | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photopex UPE Filters Series | ||||||
|---|---|---|---|---|---|---|
| With retention ratings from 1nm to 0.1μm, Cobetter Photopex™ UPE (Ultra-High Molecular Weight Polyethylene) Filter Cartridges ensure excellent retention, cleanliness and high chemical compatibility to meet the critical demands in semiconductor processes. Cobetter's superior cleaning of the high purity HDPE (high-density polyethylene) structure ensures high cleanliness and low particle shedding. The unique UPE membrane morphology provides the highest retention of both hard particles and gels. High membrane surface area options make high flow rates and extended service life possible. Cobetter Photopex UPE filters are available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| UPE membrane | Highly efficient removal of hard and soft particles Wets out easily with most solvents and resists Resists dewetting in dilute acidic and alkaline chemistries | |||||
| HDPE supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
| High surface area options | High flow rate and longer life | |||||
| Wide range of capsule sizes and industry fittings | Easy installation and replacement of competitive capsules | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Fluorolink Series | ||||||
|---|---|---|---|---|---|---|
| Fluorolink™ is an all-fluoropolymer housing designed for ultra-high purity chemicals, chemical blends, and certain agressive chemicals applications. | |||||
Industry standard fittings | Industry standard flared fittings for easy installation | |||||
Compact design | Compact design is space saving and ideal for chemical distribution and on-tool applications | |||||
High temperature rating | Temperature rating to 100°C is ideal for the majority of chemical dispense, clean, and etch processes | |||||
Three locking ring choices | Three locking ring material choices can be matched to chemicals and solvents for robust operation and long life | |||||
Sturdy mounting bracket | Integrated mounting bracket enables secure installation | |||||
Large vents/drains | Larger 1/2” vents and drains promote faster venting and draining to reduce startup and filter changeout times | |||||
Chemical-compatible O-rings | TEV O-ring and Chemraz® options from Banner Industries offer complete range of chemical compatibility and a leak tight seal | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Water
Water is used extensively thoughout semiconductor and manufacturing of other microelectronics industries. Ultrapure water is used to rinse process chemistry from wafers in clean applications and is also used to mix with ultrapure more concentrated process chemicals to dilute those for specific proceses. Filters are needed to protect RO membranes from particles, capture fines from ion exhange resin beds, and provide final particle removal in wafer rinse applications.
| Product Series | Membrane | Main Construction Material | Available Configuration | ||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PP | PES | PTFE | PE | Nylon66 | Other | PFA | PP | HDPE | PVDF | 316LSS | Capsule | Cartridge | Mini Cartridge | Housing | |||||||||||||
| Prifend → | • | • | • | ||||||||||||||||||||||||
| Prifend HF → | • | • | • | ||||||||||||||||||||||||
| Apesfend → | • | • | • | ||||||||||||||||||||||||
| EPPX → | • | • | • | ||||||||||||||||||||||||
| ArrayForce (Degasser) → | • | • | • | ||||||||||||||||||||||||
View Key Features & Benefits by Series | Water
Prifend RO Filters Series | ||||||
|---|---|---|---|---|---|---|
| Prifend™ High Service Time FDP Series filters are made of continuously rolled microfiber which can provide 3x greater lifetime than normal meltblown filters used in Pre-RO water treatment. These filters are generally used where longer lifetime, high dirt holding capacity, and low change-out frequence are required. | |||||
| Continuously rolled PP graded microfiber media | High contaminant holding capacity Good particle retention efficiency | |||||
| Multiple end cap options | Suitable for use in a variety of industry-standard housings for easy installation in existing equipment | |||||
| Wide range of pore sizes | Provides drop-in solutions for a wide range of water pre-filtration applications | |||||
| Lengths to 40 inches | For high flow, high particle challenge applications | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Prifend HF Filters Series | ||||||
|---|---|---|---|---|---|---|
| Prifend™ FDPHF HIGH Flow Filter Cartridges are large, 6-inch diameter, single open-ended pleated cartridge filters with polypropylene core, cage, and end caps. The larger diameter filters with up to 90 ft2 (8.4 m2) filtration area offer maximum flow rates as high as 396 gpm (90m3/hr) from a single cartridge. Flow direction is from inside to outside which ensures that all contamination is held within the filter. With two media options, multi-layer polypropylene and PTFE, these filters provide much higher flow rates than typical cartridge filters, making installations and change outs quicker and easier. The polypropylene fiber media provides high efficiency filtration for pure water manufacturing. With the PTFE membrane, Prifend is also an excellent choice for bulk-chemical filtration. | |||||
| Multi-layer polypropylene pleated structure, 6-inch filters | Large filtration area with high contaminant holding capacity and high throughput | |||||
| Pleated PTFE media | Available in removal ratings from 20 nm to 10 μm, making it a good choice for some chemical filtration applications which require high flow | |||||
| Pure polypropylene core and cage | Provides cleanliness and strength Good chemical compatibility | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Apesfend Filters Series | ||||||
|---|---|---|---|---|---|---|
| Apesfend™ FDS Series filters are constructed with a high polymer-based asymmetric PES (polyethersulfone) membrane which provides higher contaminant holding capacity and longer service lifetime than typical PES membranes. These filter cartridges provide efficient particle removal to ensure the quality of ultra-pure water, as well as filtration of diluted acid/base liquids. | |||||
| Highly asymmetric PES membrane | Combines excellent retention and high flow with lower differential pressures and longer filter lifetime than other typical PES membranes Ultra-clean performance out-of-box results in faster start up, reduces equipment pre-operation time | |||||
| High membrane surface area | High flow rate and longer life | |||||
| Each filter individually integrity tested | With 100% integrity testing, each filter is guaranteed to perform at installation | |||||
| Each filter flushed with 18mOhm/cm water | High cleanliness and good conductivity recovery saves water and inline flushing time | |||||
| Industry standard connections | Ease of installation and replacemen | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
EPPX Filters Series | ||||||
|---|---|---|---|---|---|---|
| EPPXGF Filter Cartridges are constructed of electronic grade PP (polypropylene) nanofiber to provide efficient effective pre-filtration of process cooling water and pure chemicals and solvents. | |||||
| Highly porous nanofiber media | Provides high flow rates, longer service life, in cost-effective device | |||||
| High-purity PP heated and melted without using adhesives | Low extractables Fast recovery to resistivity baseline | |||||
| All-polypropylene construction | Excellent chemical compatibility with most acids, bases, and solvents. | |||||
| Removal ratings from 0.1 μm to 25 μm | Meets a wide range of requirements and specifications | |||||
| Quality Assurance | Manufactured in a facility which adheres to ISO 9001 practices. | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Gas
Inert and specialty gases are used in semiconductor processing to deposit metal, provide a source of ions to dope silicon, dry wafers, and remove remaining photoresist. These and other processes require particle-free gas supplies to maintain process and yield consistency. In-line gas filters remove unwanted particles to protect sensitive components and critical ‘dry’ process steps through the manufacturing cycle.
| Product Series | Membrane | Main Construction Material | Available Configuration | ||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PP | PFA | PTFE | PE | Nylon66 | Other | PFA | PP | HDPE | PVDF | 316LSS | Capsule | Cartridge | Mini Cartridge | Housing | |||||||||||||
| Gasfender M-Type → | • | • | • | • | • | ||||||||||||||||||||||
| Gasfender N-Type PP → | • | • | • | • | • | ||||||||||||||||||||||
| Gasfender N-Type PFA → | • | • | • | • | • | ||||||||||||||||||||||
| Gasfender W-Type → | • | • | • | • | |||||||||||||||||||||||
View Key Features & Benefits by Series | Gas
Gasfender M-Type Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter's Gasfender™ M-Type GSFMP-D Series gas filters are ideal for high-purity gas systems which require a filtration rating of 0.003 microns. With a fluoropolymer internal core and double-layer PTFE membrane, this filter can be used in inert and most specialty gases. This filter has a compact design and is well suited for tight gas panel and stick installations. | |||||
| 316L Stainless steel with internal electropolish finish | Provides good corrosion resistance | |||||
| Double-layer PTFE membrane | Provides high efficiency | |||||
| Compact size with industry-standard fittings | Easy installation into new and existing gas panels, gas cabinets, gas supply sticks, equipment, and tools | |||||
| Manufactured in a Cleanroom | Manufactured in a clean room environment to ensure product cleanliness and integrity | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Gasfender N-Type PP Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter's Gasfender™ GSFNP (PP) Series in-line gas filters are compact, yet provide high flow and low pressure drop, making them ideal for CDA, inert gases, and compatible specialty gases and gas mixtures. These cost-effective filters offer high flow and 3nm filtration for a variety of applications. | |||||
| Electro-polished 316L stainless steel | Provides good corrosion resistance | |||||
| Pleated PTFE membrane and polypropylene support structure | High flow rates & low pressure drops | |||||
| Industry standard fittings and lengths for easy installation* | Easy installation into new and existing gas panels, gas cabinets, gas supply sticks, equipment, and tools | |||||
| Quality manufacturing | 100% helium leak tested, 100% integrity tested, cleanroom manufactured and double-bagged packaged | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Gasfender N-Type PFA Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter's Gasfender™ GSFNF (PFA) Series in-line gas filters are compact, yet provide high flow and low pressure drop, making them ideal for a range of specialty gases, including those with low vapor pressure. These filters are also ideal for filtering vapor or inert carrier gases which deliver silicon or metal organic precursor material to deposition processes. The filters offer superior corrosion resistance and excellent chemical compatibility with a wide range of process gases and materials, while providing 0.003μm filtration. These cost-effective filters offer high flow and 3nm filtration for a variety of applications. | |||||
| Electro-polished 316L stainless steel | Provides good corrosion resistance | |||||
| Pleated PTFE membrane and PFA support structure | High compatibility with nearly all speciality gases High flow rates & low pressure drops | |||||
| Industry standard fittings and lengths for easy installation* | Easy installation into new and existing gas panels, gas cabinets, gas supply sticks, equipment, and tools | |||||
| Quality manufacturing | 100% helium leak tested, 100% integrity tested, cleanroom manufactured and double-bagged packaged | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
GASFENDER GSFWF Filter Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter's Gasfender™ GSFWF Series in-line gas filters are compact, yet provide high flow and low pressure drop, making them ideal for a range of specialty gases. These filters with a PTFE membrane supported by PFA, offer superior corrosion resistance and excellent chemical compatibility with a wide range of process gases and materials, while providing 0.003μm filtration. | |||||
Electro-polished 316L stainless steel | Provides superior corrosion resistance | |||||
Pleated PTFE membrane and PFA support structure | High compatibility with nearly all speciality gases High flow rates & low pressure drops | |||||
Industry standard fittings and lengths for easy installation | Easy installation into new and existing gas panels, gas cabinets, gas supply sticks, equipment, and tools | |||||
Quality manufacturing | 100% helium leak tested, 100% integrity tested, cleanroom manufactured and double-bagged packaged | |||||
Specs, Flow Curves, and Part Number Configure | ||||||
Wet Etch & Clean
Wafer cleaning processes remove defect causing particles as well as organic and metal ion contamination. Photoresists are stripped with aggressive, high temperature acid based chemistries or strong organic solvent blends that soften those resists. Special acid mixtures are used to control dielectric thickness to exact specifications. These very different processes require special care in choosing the right filters for good chemical and temperature compatibility, flow, and the ability to remove sometimes high particle loads which result from etch and resist strip processes.
| Product Series | Membrane | Main Construction Material | Available Configuration | ||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PP | PES | PTFE | PE | Nylon66 | Other | PFA | PP | HDPE | PVDF | 316LSS | Capsule | Cartridge | Mini Cartridge | Housing | |||||||||||||
| Novacon → | • | • | • | • | |||||||||||||||||||||||
| Novacise → | • | • | • | • | |||||||||||||||||||||||
| ChemPhobic→ | • | • | • | • | |||||||||||||||||||||||
| Chemrapid → | • | • | • | • | |||||||||||||||||||||||
| ChemVast→ | • | • | • | • | |||||||||||||||||||||||
| Chemega → | • | • | • | • | |||||||||||||||||||||||
| EPPX → | • | • | • | ||||||||||||||||||||||||
| Prifend → | • | • | • | ||||||||||||||||||||||||
| Chemdeion | • | • | • | • | |||||||||||||||||||||||
| IonGard DL → | • | • | • | • | • | • | |||||||||||||||||||||
| Photopex UPE → | • | • | • | • | • | • | |||||||||||||||||||||
| Fluorolink Housing → | • | • | |||||||||||||||||||||||||
View Key Features & Benefits by Series | Wet Etch & Clean
Novacon Filters Series | ||||||
|---|---|---|---|---|---|---|
| Novacon® Series filters are specially designed for dilute acids, bases, and other process chemical mixtures as a cost-effective alternative for lower temperature wet etch and clean applications.The asymmetric PES (polyethersulfone) membrane provides significant retention of particles (down to 1nm) with additional beneficial characteristics including high flow rates, high particle holding capacity, and longer filter lifetime. In addition, the membrane structure and high surface energy is effective in reducing bubble formation during flow. The HDPE (High-Density Polyethylene) supports and cartridge structure ensure low metal extractables during filtration.Novacon disposable filters fluoropolymer shell and one-piece structural design provides high mechanical strength and makes installations easier. | |||||
| Highly asymmetric PES membrane | Combines excellent retention and high flow Ultra-clean performance out-of-box results in faster start up, reduces equipment pre-operation time Low surfactant binding | |||||
| High purity HDPE structure and PFA (for disposables) shell | Good chemical compatibility Low metal extractables | |||||
| High membrane surface area | High flow rate and longer life | |||||
| Industry standard connections | Ease of installation and replacement | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Provides convenience and decreases the chances of product contamination | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Chemphobic Filters Series | ||||||
|---|---|---|---|---|---|---|
| Chemphobic™ Filter Series are especially designed and ideally suited for high temperature and corrosive chemicals including hot H2SO4, H3PO4, and HNO3. The PTFE membrane ensures excellent chemical compatibility with consistent particle removal in a wide range of acids, bases and solvents. Ultra-clean all-fluropolymer construction construction minimizes metal extractables and other contaminants. High membrane surface area options provide high flow rates and extended service life to meet demanding process and tool availability requirements. Industry standard ultra-clean connections and the prewet option reduce equipment set up time. Its one-piece structural design and available T, L and In-line configurations make new installations and replacements easy. | |||||
| All fluoropolymer construction | Excellent chemical compatibility Ultra-low metal extractables | |||||
| High membrane surface area | High flow rate and longer life | |||||
| Industry standard connections | Ease of installation and replacement | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Provides convenience and decreases the chances of product contamination | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
ChemRapid Filters Series | ||||||
|---|---|---|---|---|---|---|
| Chemrapid™ Series filters are composed of a surface-modified PTFE membrane that is bonded with PFA, which results in ultra low metal extractables. It's higher surface energy solves the problem of membrane dewetting in process chemistries, especially those which are prone to outgassing. | |||||
All fluoropolymer construction | High chemical compatibility and ultra-low metal extractables | |||||
Surface modified PTFE | Resists dewetting and minimizes service disruption | |||||
100% integrity tested | Ensures complete particle capture from the start | |||||
High effective filtration area options | Provides high flow rates, low pressure drop, and long service life | |||||
Prewet option | Reduces equipment pre-operation time | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Chemvast Filters Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter Chemvast™ filter series are available in three different PTFE membranes including hydrophobic PTFE, hydrophilic PTFE or non-dewetting PTFE. With a HDPE support structure, the filter is highly compatible with most lower temperature, dilute semiconductor process chemistries Chemvast is available in a wide range of retention ratings and pore sizes to meet customer’s requirements. Non-dewetting PTFE resists dewetting by increasing the surface energy of the membrane which results in higher flow rates and filtration efficiency. With its HDPE cage, core, and high purity membrane, Chemvast is a lower cost alternative compared to the all-fluoropolymer Chemrapid® Filter Series. Chemvast Hydrophilic PTFE membrane can be used to filter dilute acidic and alkaline chemistries, as well as polar solvents without pre-wetting. | |||||
| HDPE Cage/Core | Good chemical compatibility Low metal extractable Lower cost compared to all-fluoropolymer filters | |||||
| Non-dewetting PTFE membrane option | Resists dewetting in lower temperature outgassing chemistries Enhanced retention of particles | |||||
| Hydrophilic PTFE membrane option | No prewetting Good performance in dilute HF solutions and some polar solvents | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
| 100% integrity tested | Ensures highly efficient particle retention every time | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Chemega Filters Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter Chemega™ filters are available with hydrophobic and hydrophilic highly efficient PTFE membranes to meet a wide range of high-purity chemical and solvent filtration applications. This filter is highly compatible with most lower temperature, dilute semiconductor process chemistries and solvents. Chemega is available in a wide range of retention ratings and pore sizes to meet customer’s requirements. With its polypropylene cage, core, and high purity PTFE membrane, Chemega has low metal extractables and is a good filtration solution where high-purity and high particle removal is required. Chemega Hydrophilic PTFE membrane can be used to filter dilute acidic and alkaline chemistries, as well as polar solvents without pre-wetting. | |||||
| Polypropylene Cage/Core | Good chemical compatibility Low metal extractable | |||||
| Hydrophilic PTFE membrane option | No prewetting Good performance in dilute HF solutions and some polar solvents | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
| 100% integrity tested | Ensures highly efficient particle retention every time | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
EPPX Filters Series | ||||||
|---|---|---|---|---|---|---|
| EPPXGF Filter Cartridges are constructed of electronic grade PP (polypropylene) nanofiber to provide efficient effective pre-filtration of process cooling water and pure chemicals and solvents. | |||||
| Highly porous nanofiber media | Provides high flow rates, longer service life, in cost-effective device | |||||
| High-purity PP heated and melted without using adhesives | Low extractables Fast recovery to resistivity baseline | |||||
| All-polypropylene construction | Excellent chemical compatibility with most acids, bases, and solvents. | |||||
| Removal ratings from 0.1 μm to 25 μm | Meets a wide range of requirements and specifications | |||||
| Quality Assurance | Manufactured in a facility which adheres to ISO 9001 practices. | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Prifend RO Filters Series | ||||||
|---|---|---|---|---|---|---|
| Prifend™ High Service Time FDP Series filters are made of continuously rolled microfiber which can provide 3x greater lifetime than normal meltblown filters used in Pre-RO water treatment. These filters are generally used where longer lifetime, high dirt holding capacity, and low change-out frequence are required. | |||||
| Continuously rolled PP graded microfiber media | High contaminant holding capacity Good particle retention efficiency | |||||
| Multiple end cap options | Suitable for use in a variety of industry-standard housings for easy installation in existing equipment | |||||
| Wide range of pore sizes | Provides drop-in solutions for a wide range of water pre-filtration applications | |||||
| Lengths to 40 inches | For high flow, high particle challenge applications | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
IonGard DL Purifier Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter IonGard™ DL Purifiers have been specifically designed for semiconductor wafer cleaning applications. Utilizing the structure of polyethylene and polyethersulfone composite membranes, IonGard DL Purifiers assure excellent removal of trace metal ions as well as particles on the wafer surface. The Ultraclean product design minimizes system start up time and downtime. IonGard DL is available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| Polyethersulfone filter membrane with modified PE ion exchange media | Superior removal of cations in critical cleaning water applications High removal efficiency of particles from 7nm. Ultra-low Particles and Metal Ions extractables | |||||
| Ultraclean capsules | Ultraclean capsules with industry-standard fittings are ideal for research and single-wafer wafer rinse steps. Designed to fit space-limited on-tool installations. | |||||
| Manufactured in a cleanroom | IonGard DL is clean packaged and ready to install | |||||
| Cartridge length to 30" | Longer cartridges are available for higher flow chemical blending production. | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photopex UPE Filters Series | ||||||
|---|---|---|---|---|---|---|
| With retention ratings from 1nm to 0.1μm, Cobetter Photopex™ UPE (Ultra-High Molecular Weight Polyethylene) Filter Cartridges ensure excellent retention, cleanliness and high chemical compatibility to meet the critical demands in semiconductor processes. Cobetter's superior cleaning of the high purity HDPE (high-density polyethylene) structure ensures high cleanliness and low particle shedding. The unique UPE membrane morphology provides the highest retention of both hard particles and gels. High membrane surface area options make high flow rates and extended service life possible. Cobetter Photopex UPE filters are available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| UPE membrane | Highly efficient removal of hard and soft particles Wets out easily with most solvents and resists Resists dewetting in dilute acidic and alkaline chemistries | |||||
| HDPE supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
| High surface area options | High flow rate and longer life | |||||
| Wide range of capsule sizes and industry fittings | Easy installation and replacement of competitive capsules | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Fluorolink Series | ||||||
|---|---|---|---|---|---|---|
| Fluorolink™ is an all-fluoropolymer housing designed for ultra-high purity chemicals, chemical blends, and certain agressive chemicals applications. | |||||
Industry standard fittings | Industry standard flared fittings for easy installation | |||||
Compact design | Compact design is space saving and ideal for chemical distribution and on-tool applications | |||||
High temperature rating | Temperature rating to 100°C is ideal for the majority of chemical dispense, clean, and etch processes | |||||
Three locking ring choices | Three locking ring material choices can be matched to chemicals and solvents for robust operation and long life | |||||
Sturdy mounting bracket | Integrated mounting bracket enables secure installation | |||||
Large vents/drains | Larger 1/2” vents and drains promote faster venting and draining to reduce startup and filter changeout times | |||||
Chemical-compatible O-rings | TEV O-ring and Chemraz® options from Banner Industries offer complete range of chemical compatibility and a leak tight seal | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Chemical Distribution
Chemical and slurry delivery systems are an efficient and safe way to supply high volumes of chemicals and solvents to process equipment in the cleanroom. Cartridge filters are installed in PFA, PP, and even stainless steel housings in these systems and remove particles from drums or totes to protect chemical lines and the processes they are intended to supply.
| Product Series | Membrane | Main Construction Material | Available Configuration | ||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PP | PES | PTFE | PE | Nylon66 | Other | PFA | PP | HDPE | PVDF | 316LSS | Capsule | Cartridge | Mini Cartridge | Housing | |||||||||||||
| Pleavalid → | • | • | • | • | |||||||||||||||||||||||
| Keevalid → | • | • | • | • | |||||||||||||||||||||||
| Dualvalid → | • | • | • | • | |||||||||||||||||||||||
| Novacon → | • | • | • | • | |||||||||||||||||||||||
| Novacise → | • | • | • | • | |||||||||||||||||||||||
| ChemPhobic→ | • | • | • | • | |||||||||||||||||||||||
| Chemrapid → | • | • | • | • | |||||||||||||||||||||||
| ChemVast→ | • | • | • | • | |||||||||||||||||||||||
| Chemega → | • | • | • | • | |||||||||||||||||||||||
| EPPX → | • | • | • | ||||||||||||||||||||||||
| Prifend → | • | • | • | ||||||||||||||||||||||||
| Prifend HF → | • | • | • | ||||||||||||||||||||||||
| Chemdeion | • | • | • | • | |||||||||||||||||||||||
| IonGard SL→ | • | • | • | • | |||||||||||||||||||||||
| IonGard Aqua Purifier | • | • | • | • | • | ||||||||||||||||||||||
| IonGard DL → | • | • | • | • | • | • | |||||||||||||||||||||
| Photopex Nylon → | • | • | • | • | • | ||||||||||||||||||||||
| Photopex UPE → | • | • | • | • | • | • | |||||||||||||||||||||
| Fluorolink Housing → | • | • | |||||||||||||||||||||||||
| HCP Housings → | • | • | • | ||||||||||||||||||||||||
View Key Features & Benefits by Series | Chemical Distribution
Pleavalid CMP Filters Series | ||||||
|---|---|---|---|---|---|---|
| Pleavalid pleated CMP filters are well suited for higher solids slurries and those which may be more prone to agglomerations. The wide pleats provide more surface area which increases service life and fewer filter change outs. Cartridges and capsules come in a wide range of pore sizes, from 0.1um to 5.0um. Pleavalid cartridge filters can be used in in the global loop to protect on-tool filters. As capsules, the pleated design is an effective final filter, especially in higher solids oxide slurries. | |||||
| Pleated micro and nanofiber media | Provides high flow rates and dirt holding capacity
Effective in higher solids and reducing formation of agglomerations | |||||
| Polypropylene media | Compatible with most slurries | |||||
| Flushed with Ultra-Pure Water | Ensures high cleanliness and low particle shedding | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Keevalid CMP Filters Series | ||||||
|---|---|---|---|---|---|---|
| Keevalid CMP filters are ideal where the highly efficient removal of defect causing contaminants is critical. The continuously graded pore structure removes defect causing particles while not changing the slurry manufacture's intended particle size distribution. Rolled nanofiber provides similar classification, but with higher flow characteristics. Cartridges and capsules come in a wide range of pore sizes, from 70nm to 40um, making them suitable for extending the life of downstream on-tool filters or as the final defect reducing solution just before slurry is dispensed. | |||||
| Graded-density PP Depth Media | Highly efficient in removing defect-causing particles without changing the intended working particle size distribution | |||||
| Optional Rolled PP Nanofiber Media | Provides the highest flux rate and efficient contaminant removal | |||||
| Flushed with Ultra-Pure Water | Ensures high cleanliness and low particle shedding | |||||
| Cartridge Length to 20" | Cartridge lengths are available for higher flow source and global loop applications | |||||
| Variety of Capsule Sizes | Fits most on-tool flow and spaces | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Dualvalid CMP Filters Series | ||||||
|---|---|---|---|---|---|---|
| Dualvalid CMP filters are uniquely designed for integrated circuit manufacturers and chemical mechanical planarization slurry manufacturers. Cobetter's patented construction combines two slurry filtration technologies, wide pleats and rolled graded density polypropylene media in one filter. The outer wide pleats increase media surface area and promote longer filter life, while the rolled media construction around the core provides efficient retention of those particles which are likely to cause scratches on the surface of the wafer. Dualvalid is a good choice for slurries where lower pressure drops are desirable, without giving up efficient defect-causing particle removal. | |||||
| Outer layer wide pleats | Provides high flow rates and dirt holding capacity | |||||
| Inner multi-layer nanofiber rolled media | Provides high flux rate and efficient defect causing particle removal | |||||
| Polypropylene Media | Compatible with most slurries | |||||
| Flushed with Ultra-Pure Water | Ensures high cleanliness and low particle shedding | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Novacon Filters Series | ||||||
|---|---|---|---|---|---|---|
| Novacon® Series filters are specially designed for dilute acids, bases, and other process chemical mixtures as a cost-effective alternative for lower temperature wet etch and clean applications.The asymmetric PES (polyethersulfone) membrane provides significant retention of particles (down to 1nm) with additional beneficial characteristics including high flow rates, high particle holding capacity, and longer filter lifetime. In addition, the membrane structure and high surface energy is effective in reducing bubble formation during flow. The HDPE (High-Density Polyethylene) supports and cartridge structure ensure low metal extractables during filtration.Novacon disposable filters fluoropolymer shell and one-piece structural design provides high mechanical strength and makes installations easier. | |||||
| Highly asymmetric PES membrane | Combines excellent retention and high flow Ultra-clean performance out-of-box results in faster start up, reduces equipment pre-operation time Low surfactant binding | |||||
| High purity HDPE structure and PFA (for disposables) shell | Good chemical compatibility Low metal extractables | |||||
| High membrane surface area | High flow rate and longer life | |||||
| Industry standard connections | Ease of installation and replacement | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Provides convenience and decreases the chances of product contamination | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Chemphobic Filters Series | ||||||
|---|---|---|---|---|---|---|
| Chemphobic™ Filter Series are especially designed and ideally suited for high temperature and corrosive chemicals including hot H2SO4, H3PO4, and HNO3. The PTFE membrane ensures excellent chemical compatibility with consistent particle removal in a wide range of acids, bases and solvents. Ultra-clean all-fluropolymer construction construction minimizes metal extractables and other contaminants. High membrane surface area options provide high flow rates and extended service life to meet demanding process and tool availability requirements. Industry standard ultra-clean connections and the prewet option reduce equipment set up time. Its one-piece structural design and available T, L and In-line configurations make new installations and replacements easy. | |||||
| All fluoropolymer construction | Excellent chemical compatibility Ultra-low metal extractables | |||||
| High membrane surface area | High flow rate and longer life | |||||
| Industry standard connections | Ease of installation and replacement | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Provides convenience and decreases the chances of product contamination | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
ChemRapid Filters Series | ||||||
|---|---|---|---|---|---|---|
| Chemrapid™ Series filters are composed of a surface-modified PTFE membrane that is bonded with PFA, which results in ultra low metal extractables. It's higher surface energy solves the problem of membrane dewetting in process chemistries, especially those which are prone to outgassing. | |||||
All fluoropolymer construction | High chemical compatibility and ultra-low metal extractables | |||||
Surface modified PTFE | Resists dewetting and minimizes service disruption | |||||
100% integrity tested | Ensures complete particle capture from the start | |||||
High effective filtration area options | Provides high flow rates, low pressure drop, and long service life | |||||
Prewet option | Reduces equipment pre-operation time | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Chemvast Filters Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter Chemvast™ filter series are available in three different PTFE membranes including hydrophobic PTFE, hydrophilic PTFE or non-dewetting PTFE. With a HDPE support structure, the filter is highly compatible with most lower temperature, dilute semiconductor process chemistries Chemvast is available in a wide range of retention ratings and pore sizes to meet customer’s requirements. Non-dewetting PTFE resists dewetting by increasing the surface energy of the membrane which results in higher flow rates and filtration efficiency. With its HDPE cage, core, and high purity membrane, Chemvast is a lower cost alternative compared to the all-fluoropolymer Chemrapid® Filter Series. Chemvast Hydrophilic PTFE membrane can be used to filter dilute acidic and alkaline chemistries, as well as polar solvents without pre-wetting. | |||||
| HDPE Cage/Core | Good chemical compatibility Low metal extractable Lower cost compared to all-fluoropolymer filters | |||||
| Non-dewetting PTFE membrane option | Resists dewetting in lower temperature outgassing chemistries Enhanced retention of particles | |||||
| Hydrophilic PTFE membrane option | No prewetting Good performance in dilute HF solutions and some polar solvents | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
| 100% integrity tested | Ensures highly efficient particle retention every time | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Chemega Filters Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter Chemega™ filters are available with hydrophobic and hydrophilic highly efficient PTFE membranes to meet a wide range of high-purity chemical and solvent filtration applications. This filter is highly compatible with most lower temperature, dilute semiconductor process chemistries and solvents. Chemega is available in a wide range of retention ratings and pore sizes to meet customer’s requirements. With its polypropylene cage, core, and high purity PTFE membrane, Chemega has low metal extractables and is a good filtration solution where high-purity and high particle removal is required. Chemega Hydrophilic PTFE membrane can be used to filter dilute acidic and alkaline chemistries, as well as polar solvents without pre-wetting. | |||||
| Polypropylene Cage/Core | Good chemical compatibility Low metal extractable | |||||
| Hydrophilic PTFE membrane option | No prewetting Good performance in dilute HF solutions and some polar solvents | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
| 100% integrity tested | Ensures highly efficient particle retention every time | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
EPPX Filters Series | ||||||
|---|---|---|---|---|---|---|
| EPPXGF Filter Cartridges are constructed of electronic grade PP (polypropylene) nanofiber to provide efficient effective pre-filtration of process cooling water and pure chemicals and solvents. | |||||
| Highly porous nanofiber media | Provides high flow rates, longer service life, in cost-effective device | |||||
| High-purity PP heated and melted without using adhesives | Low extractables Fast recovery to resistivity baseline | |||||
| All-polypropylene construction | Excellent chemical compatibility with most acids, bases, and solvents. | |||||
| Removal ratings from 0.1 μm to 25 μm | Meets a wide range of requirements and specifications | |||||
| Quality Assurance | Manufactured in a facility which adheres to ISO 9001 practices. | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Prifend RO Filters Series | ||||||
|---|---|---|---|---|---|---|
| Prifend™ High Service Time FDP Series filters are made of continuously rolled microfiber which can provide 3x greater lifetime than normal meltblown filters used in Pre-RO water treatment. These filters are generally used where longer lifetime, high dirt holding capacity, and low change-out frequence are required. | |||||
| Continuously rolled PP graded microfiber media | High contaminant holding capacity Good particle retention efficiency | |||||
| Multiple end cap options | Suitable for use in a variety of industry-standard housings for easy installation in existing equipment | |||||
| Wide range of pore sizes | Provides drop-in solutions for a wide range of water pre-filtration applications | |||||
| Lengths to 40 inches | For high flow, high particle challenge applications | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
Prifend HF Filters Series | ||||||
|---|---|---|---|---|---|---|
| Prifend™ FDPHF HIGH Flow Filter Cartridges are large, 6-inch diameter, single open-ended pleated cartridge filters with polypropylene core, cage, and end caps. The larger diameter filters with up to 90 ft2 (8.4 m2) filtration area offer maximum flow rates as high as 396 gpm (90m3/hr) from a single cartridge. Flow direction is from inside to outside which ensures that all contamination is held within the filter. With two media options, multi-layer polypropylene and PTFE, these filters provide much higher flow rates than typical cartridge filters, making installations and change outs quicker and easier. The polypropylene fiber media provides high efficiency filtration for pure water manufacturing. With the PTFE membrane, Prifend is also an excellent choice for bulk-chemical filtration. | |||||
| Multi-layer polypropylene pleated structure, 6-inch filters | Large filtration area with high contaminant holding capacity and high throughput | |||||
| Pleated PTFE media | Available in removal ratings from 20 nm to 10 μm, making it a good choice for some chemical filtration applications which require high flow | |||||
| Pure polypropylene core and cage | Provides cleanliness and strength Good chemical compatibility | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
IonGard SL Purifier Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter IonGard™ SL Purifier has been specifically designed for the removal of metal contaminants from photoresists and ultra high purity solvents. By modifying the ion exchange groups on the surface of membrane, the IonGard SL Purifier provides a fast and effective metal ions removal capability in various solvents and solvent resin mixtures. Available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| Modified PE purification membrane | Provides high metal removal efficiency Provides high ion-exchange capacity Provides total metal removal for ultraclean chemical manufacturers | |||||
| Ultraclean HDPE capsules | Ultraclean capsules with industry-standard fittings are perfect for research and small batch production. | |||||
| Manufactured in a cleanroom | IonGard SL is clean packaged and ready to install | |||||
| Cartridge length to 20" | Ideal for resist and solvent production lines | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
IonGard DL Purifier Series | ||||||
|---|---|---|---|---|---|---|
| Cobetter IonGard™ DL Purifiers have been specifically designed for semiconductor wafer cleaning applications. Utilizing the structure of polyethylene and polyethersulfone composite membranes, IonGard DL Purifiers assure excellent removal of trace metal ions as well as particles on the wafer surface. The Ultraclean product design minimizes system start up time and downtime. IonGard DL is available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| Polyethersulfone filter membrane with modified PE ion exchange media | Superior removal of cations in critical cleaning water applications High removal efficiency of particles from 7nm. Ultra-low Particles and Metal Ions extractables | |||||
| Ultraclean capsules | Ultraclean capsules with industry-standard fittings are ideal for research and single-wafer wafer rinse steps. Designed to fit space-limited on-tool installations. | |||||
| Manufactured in a cleanroom | IonGard DL is clean packaged and ready to install | |||||
| Cartridge length to 30" | Longer cartridges are available for higher flow chemical blending production. | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photopex Nylon Filters Series | ||||||
|---|---|---|---|---|---|---|
| With high flow rate performance, excellent retention capabilities and cleanliness, Cobetter Photopex™ Nylon 6,6 Filter Cartridges are well suited for fi ltering photoresists, solvents and other chemicals in semiconductor processes. Photopex Nylon 6,6 Filter Cartridges use a pure unmodifi ed hydrophilic nylon membrane with guaranteed levels of metal extractable and particle cleanliness. The fi lter’s cleanliness reduces chemical waste and time to process after installation. Cobetter Photopex Nylon 6,6 fi lters are available in a wide variety of sizes and confi gurations to meet all your requirements. | |||||
| Cobetter nylon 6,6 membrane | Naturally hydrophilic media wets out easily with most fluids Adsorptive properties effective in removing certain contaminants High particle removal efficiency | |||||
| HDPE or PP supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
| Cartridge length to 20 inches | High flow and longer service life for photochemical manufacturing | |||||
| Wide range of capsule sizes and industry fittings | Easy installation and replacement of competitive capsules | |||||
| Higher initial cleanliness | Reduces pre-process time and chemical waste | |||||
| 100% integrity tested | Chance of abnormal particle passage is eliminated | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Photopex UPE Filters Series | ||||||
|---|---|---|---|---|---|---|
| With retention ratings from 1nm to 0.1μm, Cobetter Photopex™ UPE (Ultra-High Molecular Weight Polyethylene) Filter Cartridges ensure excellent retention, cleanliness and high chemical compatibility to meet the critical demands in semiconductor processes. Cobetter's superior cleaning of the high purity HDPE (high-density polyethylene) structure ensures high cleanliness and low particle shedding. The unique UPE membrane morphology provides the highest retention of both hard particles and gels. High membrane surface area options make high flow rates and extended service life possible. Cobetter Photopex UPE filters are available in a wide variety of sizes and configurations to meet all your requirements. | |||||
| UPE membrane | Highly efficient removal of hard and soft particles Wets out easily with most solvents and resists Resists dewetting in dilute acidic and alkaline chemistries | |||||
| HDPE supports and structure | High chemical compatibility High cleanliness, including low metal extractables | |||||
| High surface area options | High flow rate and longer life | |||||
| Wide range of capsule sizes and industry fittings | Easy installation and replacement of competitive capsules | |||||
| Higher cleanliness option | Meets stringent process requirements for metals, anions, and organic contaminants | |||||
| Prewet option | Reduces pre-operation time Easy start up with aqueous-based chemicals | |||||
Specs, Flow Curves, and Part Number Configurator | ||||||
Fluorolink Series | ||||||
|---|---|---|---|---|---|---|
| Fluorolink™ is an all-fluoropolymer housing designed for ultra-high purity chemicals, chemical blends, and certain agressive chemicals applications. | |||||
Industry standard fittings | Industry standard flared fittings for easy installation | |||||
Compact design | Compact design is space saving and ideal for chemical distribution and on-tool applications | |||||
High temperature rating | Temperature rating to 100°C is ideal for the majority of chemical dispense, clean, and etch processes | |||||
Three locking ring choices | Three locking ring material choices can be matched to chemicals and solvents for robust operation and long life | |||||
Sturdy mounting bracket | Integrated mounting bracket enables secure installation | |||||
Large vents/drains | Larger 1/2” vents and drains promote faster venting and draining to reduce startup and filter changeout times | |||||
Chemical-compatible O-rings | TEV O-ring and Chemraz® options from Banner Industries offer complete range of chemical compatibility and a leak tight seal | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
HCP Housing Series | ||||||
|---|---|---|---|---|---|---|
| HCP Filter Housings are constructed of 100% natural polypropylene or PVDF without any coloring agents or chemicals. These housings provide broad chemical compatibility and are ideally suited for food & beverage, ultrapure water, and other high purity chemical applications. | |||||
100% natural polypropylene (PP) construction or PVDF | Provides cleanliness and broad chemical compatibility Low extractables - no chemicals and colorants are released during filtration process. | |||||
T-line configuration with top inlet and top outlet | inlet and top outletT-line configuration allows tubing to be kept inline | |||||
Drain on housing bottom | Easy to drain | |||||
Specs, Flow Curves, and Part Number Configurator → | ||||||
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